@book
{TN_libero_mab2,
author = {
},
title = {
Handbook of microlithography, micromachining, and microfabrication
1 Microlithography
},
publisher = {SPIE Optical Engineering Pr.},
isbn = {0819423785},
isbn = {0852969066},
keywords = {
Lithografie Halbleitertechnologie
},
year = {1997},
booktitle = {IEE materials & devices series ; 12},
booktitle = {SPIE Press monograph ; 39},
address = {
Bellingham, Wash.
},
url = {
http://slubdd.de/katalog?TN_libero_mab2
}
}