%0 Book
%T Handbook of microlithography, micromachining, and microfabrication 1 Microlithography
%I SPIE Optical Engineering Pr.
%@ 0819423785
%@ 0852969066
%K Lithografie Halbleitertechnologie
%D 1997
%C SPIE Optical Engineering Pr.
%C Bellingham, Wash.
%U http://slubdd.de/katalog?TN_libero_mab2
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