TY -
BOOK
TI -
Handbook of microlithography, micromachining, and microfabrication
1 Microlithography
PB - SPIE Optical Engineering Pr.
SN - 0819423785
SN - 0852969066
KW - Lithografie Halbleitertechnologie
PY - 1997
BT - IEE materials & devices series ; 12
BT - SPIE Press monograph ; 39
CY - Bellingham, Wash.
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -