@book
{TN_libero_mab2,
author = {
Klemm, Markus
Technische Universität Dresden
},
title = {
Acoustic simulation and characterization of capacitive micromachined ultrasonic transducers
},
publisher = {TUDpress},
isbn = {9783959081009},
keywords = {
Hochschulschrift
},
year = {2017},
booktitle = {Dresdner Beiträge zur Sensorik ; Band 66},
address = {
Dresden
},
url = {
http://slubdd.de/katalog?TN_libero_mab2
}
}