author = { Materials Research Society Harper, James M. AND Miyake, Kiyoshi AND McNeill, John Robert AND Gorbatkin, Steven M. },

title = { Low energy ion beam and plasma modification of materials symposium held April 30 - May 2, 1991, Anaheim, California, USA },

publisher = {Materials Res. Soc.},

isbn = {1558991174},

keywords = { Materials Congresses , Ion bombardment Congresses , Electronics Materials Effect of radiation on Congresses , Materials , Congresses , Ion bombardment , Electronics , Effect of radiation on , Konferenzschrift 1991 Anaheim, Calif. , Konferenzschrift , Niedrige Energie , Ionenstrahl , Materialbearbeitung , Plasmastrahlbearbeitung },

year = {1991},

abstract = {Presentations from the Symposium on Low Energy Ion Beam and Plasma Modification of Materials held at the Spring 1991 Materials Research Society Conference},

booktitle = {Materials Research Society symposia proceedings ; 223},

booktitle = {Materials Research Society symposium proceedings ; 223},

address = { Pittsburgh, Pa. },

url = { http://slubdd.de/katalog?TN_libero_mab2 }