%0 Book
%T Silicon-on-insulator technology materials to VLSI
%A Colinge, Jean-Pierre
%I Kluwer
%@ 0792391500
%K Semiconductors
%K Silicon-on-insulator technology
%K Integrated circuits
%K Very large scale integration
%K Materials
%K SOI-Technik
%D 1991
%X Literaturverz. S. 203 - 224
%C Kluwer
%C Boston [u.a.]
%U http://slubdd.de/katalog?TN_libero_mab2
Download citation