@book
{TN_libero_mab2,
author = {
Campbell, Stephen A.
},
title = {
Fabrication engineering at the micro- and nanoscale
},
edition = {
4. ed.
}
,
publisher = {Oxford Univ. Press},
isbn = {9780199861224},
keywords = {
Semiconductors Design and construction
},
year = {2013},
abstract = {Includes bibliographical references and index},
booktitle = {Oxford series in electrical and computer engineering},
address = {
New York [u.a.]
},
url = {
http://slubdd.de/katalog?TN_libero_mab2
}
}