%0 Book
%T Fabrication engineering at the micro- and nanoscale
%A Campbell, Stephen A.
%7 4. ed.
%I Oxford Univ. Press
%@ 9780199861224
%K Semiconductors Design and construction
%D 2013
%X Includes bibliographical references and index
%C Oxford Univ. Press
%C New York [u.a.]
%U http://slubdd.de/katalog?TN_libero_mab2
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