TY - BOOK
AU - Campbell, Stephen A.
TI - Fabrication engineering at the micro- and nanoscale
ET - 4. ed.
PB - Oxford Univ. Press
SN - 9780199861224
KW - Semiconductors Design and construction
PY - 2013
N2 - Includes bibliographical references and index
BT - Oxford series in electrical and computer engineering
CY - New York [u.a.]
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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