TY -
BOOK
AU - Perevoščikov, Viktor A.
AU - Skupov, Vladimir D.
AU - Perevostchikov, Viktor A.
TI -
Gettering defects in semiconductors
PB - Springer
SN - 354026244X
SN - 9783540262442
KW - Semiconductors Defects
KW - Semiconductors Materials
KW - Getters
KW - Halbleiter
KW - Störstelle
KW - Getterung
PY - 2005
N2 - Literaturverz. S. 343 - 366
BT - Advanced microelectronics ; 19
CY - Berlin
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -