author = { Ho, Paul S. },

title = { Low dielectric constant materials for IC applications },

publisher = {Springer},

isbn = {3540678190},

keywords = { Electric insulators and insulation , Dielectrics , Integrated circuits , Aufsatzsammlung , Integrierte Schaltung , Werkstoff , Dielektrische Eigenschaft },

year = {2003},

abstract = {Literaturangaben},

booktitle = {Advanced microelectronics ; 9},

booktitle = {Physics and astronomy online library},

address = { Berlin },

url = { http://slubdd.de/katalog?TN_libero_mab2 }