TY - BOOK
AU - Moreau, Wayne M.
TI - Semiconductor lithography principles, practices, and materials
PB - Plenum Pr.
SN - 0306421852
KW - Semiconductors
KW - Microlithography
KW - Photoresists
KW - Lithografie Halbleitertechnologie
PY - 1988
BT - Microdevices
CY - New York, NY [u.a.]
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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