author = { Siffert, Paul AND Krimmel, Eberhard F. },

title = { Silicon evolution and future of a technology ; with 21 tables },

publisher = {Springer},

isbn = {3540405461},

keywords = { Silicon , Silicon compounds , Siliciumhalbleiter },

year = {2004},

abstract = {Literaturangaben},

address = { Berlin },

url = { http://slubdd.de/katalog?TN_libero_mab2 }