author = { Advanced Study Institute on Smart Sensors and MEMS 2003 Póvoa de Varzim Yurish, Sergey Y. },

title = { Smart sensors and MEMS [proceedings of the NATO Advanced Study Institute on Smart Sensors and MEMS, Povoa de Varzim, Portugal, 8 - 19 September 2003 },

publisher = {Kluwer Academic Publ.},

isbn = {1402029276},

isbn = {1402029292},

isbn = {1402029284},

keywords = { Detectors Technological innovations Congresses , Microelectromechanical systems Congresses , Scanning systems Congresses , Sistemas microeletromecânicos (congressos) , Konferenzschrift 2003 Póvoa de Varzim , Intelligenter Sensor , Póvoa de Varzim <2004> , MEMS , Abtastsystem },

year = {2004},

booktitle = {NATO science series ; Sub-series 2, Mathematics, physics and chemistry ; 181},

address = { Dordrecht [u.a.] },

url = { http://slubdd.de/katalog?TN_libero_mab2 }