%0 Book
%T Smart sensors and MEMS [proceedings of the NATO Advanced Study Institute on Smart Sensors and MEMS, Povoa de Varzim, Portugal, 8 - 19 September 2003
%A Advanced Study Institute on Smart Sensors and MEMS 2003 Póvoa de Varzim
%A Yurish, Sergey Y.
%I Kluwer Academic Publ.
%@ 1402029276
%@ 1402029292
%@ 1402029284
%K Detectors Technological innovations Congresses
%K Microelectromechanical systems Congresses
%K Scanning systems Congresses
%K Sistemas microeletromecânicos (congressos)
%K Konferenzschrift 2003 Póvoa de Varzim
%K Intelligenter Sensor
%K Póvoa de Varzim <2004>
%K MEMS
%K Abtastsystem
%D 2004
%C Kluwer Academic Publ.
%C Dordrecht [u.a.]
%U http://slubdd.de/katalog?TN_libero_mab2
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