TY - BOOK
AU - Advanced Study Institute on Smart Sensors and MEMS 2003 Póvoa de Varzim
AU - Yurish, Sergey Y.
TI - Smart sensors and MEMS [proceedings of the NATO Advanced Study Institute on Smart Sensors and MEMS, Povoa de Varzim, Portugal, 8 - 19 September 2003
PB - Kluwer Academic Publ.
SN - 1402029276
SN - 1402029292
SN - 1402029284
KW - Detectors Technological innovations Congresses
KW - Microelectromechanical systems Congresses
KW - Scanning systems Congresses
KW - Sistemas microeletromecânicos (congressos)
KW - Konferenzschrift 2003 Póvoa de Varzim
KW - Intelligenter Sensor
KW - Póvoa de Varzim <2004>
KW - MEMS
KW - Abtastsystem
PY - 2004
BT - NATO science series ; Sub-series 2, Mathematics, physics and chemistry ; 181
CY - Dordrecht [u.a.]
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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