author = { Dziuban, Jan A. },

title = { Bonding in microsystem technology },

publisher = {Springer Netherland},

isbn = {9781402045783},

isbn = {1402045786},

keywords = { Microtechnology , Micromachining , Mikrosystemtechnik , Bonden },

year = {2006},

abstract = {Literaturangaben},

booktitle = {Springer series in advanced microelectronics ; 24},

address = { Berlin [u.a.] },

url = { http://slubdd.de/katalog?TN_libero_mab2 }