author = { Papanikolaou, Antonis },

title = { Three dimensional system integration IC stacking process and design },

publisher = {Springer},

isbn = {9781441909619},

isbn = {1441909613},

keywords = { Integrated circuit layout , Integrierte Schaltung , Dreidimensionale Integration },

year = {2011},

address = { New York },

url = { http://slubdd.de/katalog?TN_libero_mab2 }