@misc
{TN_libero_mab2,
author = {
Huff, H.R
AND
Gilmer, D.C
},
title = {
High Dielectric Constant Materials
VLSI MOSFET Applications
},
publisher = {Springer Berlin Heidelberg},
isbn = {9783540264620},
keywords = {
Condensed matter
,
Optical materials
,
Surfaces (Physics)
,
Chemistry
,
Aufsatzsammlung
,
VLSI
,
MOS-FET
,
Gate Elektronik
,
Siliciumdioxid
,
Dielektrische Schicht
,
Siliciumoxinitride
},
year = {2005},
booktitle = {Springer Series in Advanced Microelectronics ; 16},
booktitle = {SpringerLink ; Bücher},
address = {
Berlin, Heidelberg
},
url = {
http://slubdd.de/katalog?TN_libero_mab2
}
}