TY -
GEN
AU - Waechtler, Thomas
AU - Shen, Yingzhong
AU - Jakob, Alexander
AU - Ecke, Ramona
AU - Schulz, Stefan E.
AU - Wittenbecher, Lars
AU - Sterzel, Hans-Josef
AU - Tiefensee, Kristin
AU - Oswald, Steffen
AU - Schulze, Steffen
AU - Lang, Heinrich
AU - Hietschold, Michael
AU - Gessner, Thomas
TI -
Evaluation of Phosphite and Phosphane Stabilized Copper(I) Trifluoroacetates as Precursors for the Metal-Organic Chemical Vapor Deposition of Copper
PB - Technische Universität Chemnitz
KW - Technik
KW - CVD-Verfahren
KW - Metallisieren
KW - ULSI
KW - technology
KW - Decarboxylierung
KW - Kupfer(I)-Carboxylat
KW - Kupfer
PY - 2006-03-16
N2 - URL: http://www.mam-conference.org/
N2 - Quelle: Poster presentation; Materials for Advanced Metallization Conference (MAM 2006), 6 to 8 March 2006, Grenoble, France
CY - Chemnitz
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -