author = { Heinrich, Michael AND Budil, Matthias AND Pötzl, Hans W. },

title = { Simulation of transient boron diffusion during rapid thermal annealing in silicon },

publisher = {AIP Publishing},

isbn = {0021-8979},

isbn = {1089-7550},

keywords = { General Physics and Astronomy },

year = {1991},

url = { http://slubdd.de/katalog?TN_libero_mab2 }