author = { Li, C. I. AND Kuo, P. AND Lai, H. H. AND Ma, K. AND Liu, R. AND Wu, H. H. AND Chan, M. AND Yang, C. L. AND Wu, J. Y. AND Guo, B. N. AND Colombeau, B. AND Thirumal, T. AND Arevalo, E. AND Toh, T. AND Shim, K. H. AND Sun, H. L. AND Wu, T. AND Lu, S. AND Matsuo, Jiro AND Kase, Masataka AND Aoki, Takaaki AND Seki, Toshio },

title = { Enabling Solutions for 28 nm CMOS Advanced Junction Formation },

publisher = {AIP},

isbn = {0094-243X},

year = {2011},

url = { http://slubdd.de/katalog?TN_libero_mab2 }