author = { Feiring, Andrew E. AND Crawford, Michael K. AND Farnham, William B. AND Feldman, Jerald AND French, Roger H. AND Junk, Christopher P. AND Leffew, Kenneth W. AND Petrov, Viacheslav A. AND Qiu, Weiming AND Schadt, Frank L. AND Tran, Hoang V. AND Zumsteg, Fredrick C. },

title = { New Amorphous Fluoropolymers of Tetrafluoroethylene with Fluorinated and Non-Fluorinated Tricyclononenes. Semiconductor Photoresists for Imaging at 157 and 193 nm },

publisher = {American Chemical Society (ACS)},

isbn = {0024-9297},

isbn = {1520-5835},

keywords = { Materials Chemistry , Inorganic Chemistry , Polymers and Plastics , Organic Chemistry },

year = {2006},

url = { http://slubdd.de/katalog?TN_libero_mab2 }