TY -
GEN
AU - Feiring, Andrew E.
AU - Crawford, Michael K.
AU - Farnham, William B.
AU - Feldman, Jerald
AU - French, Roger H.
AU - Junk, Christopher P.
AU - Leffew, Kenneth W.
AU - Petrov, Viacheslav A.
AU - Qiu, Weiming
AU - Schadt, Frank L.
AU - Tran, Hoang V.
AU - Zumsteg, Fredrick C.
TI -
New Amorphous Fluoropolymers of Tetrafluoroethylene with Fluorinated and Non-Fluorinated Tricyclononenes. Semiconductor Photoresists for Imaging at 157 and 193 nm
PB - American Chemical Society (ACS)
SN - 0024-9297
SN - 1520-5835
KW - Materials Chemistry
KW - Inorganic Chemistry
KW - Polymers and Plastics
KW - Organic Chemistry
PY - 2006
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -