@misc {TN_libero_mab2,
author = { Hald, Axel AND Marquardt, Hartmut AND Herzogenrath, Pekka AND Scheible, Jurgen AND Lienig, Jens AND Seelhorst, Johannes },
title = { Full Custom MEMS Design: 2.5D Fabrication-Process Simulation for 3D Field-Solver-Based Circuit Extraction },
publisher = {Institute of Electrical and Electronics Engineers (IEEE)},
isbn = {1530-437X},
isbn = {1558-1748},
isbn = {2379-9153},
keywords = { Electrical and Electronic Engineering , Instrumentation },
year = {2019},
url = { http://slubdd.de/katalog?TN_libero_mab2 }
}
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