%0 Generic
%T Full Custom MEMS Design: 2.5D Fabrication-Process Simulation for 3D Field-Solver-Based Circuit Extraction
%A Hald, Axel
%A Marquardt, Hartmut
%A Herzogenrath, Pekka
%A Scheible, Jurgen
%A Lienig, Jens
%A Seelhorst, Johannes
%I Institute of Electrical and Electronics Engineers (IEEE)
%@ 1530-437X
%@ 1558-1748
%@ 2379-9153
%K Electrical and Electronic Engineering
%K Instrumentation
%D 2019
%C Institute of Electrical and Electronics Engineers (IEEE)
%U http://slubdd.de/katalog?TN_libero_mab2
Download citation