TY - GEN
AU - Hald, Axel
AU - Marquardt, Hartmut
AU - Herzogenrath, Pekka
AU - Scheible, Jurgen
AU - Lienig, Jens
AU - Seelhorst, Johannes
TI - Full Custom MEMS Design: 2.5D Fabrication-Process Simulation for 3D Field-Solver-Based Circuit Extraction
PB - Institute of Electrical and Electronics Engineers (IEEE)
SN - 1530-437X
SN - 1558-1748
SN - 2379-9153
KW - Electrical and Electronic Engineering
KW - Instrumentation
PY - 2019
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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