author = { Heidarpour Roshan, Meisam AND Zaliasl, Samira AND Joo, Kimo AND Souri, Kamran AND Palwai, Rajkumar AND Chen, Lijun Will AND Singh, Amanpreet AND Pamarti, Sudhakar AND Miller, Nicholas J. AND Doll, Joseph C. AND Arft, Carl AND Tabatabaei, Sassan AND Sechen, Carl AND Partridge, Aaron AND Menon, Vinod },

title = { A MEMS-Assisted Temperature Sensor With 20- $\mu \text{K}$ Resolution, Conversion Rate of 200 S/s, and FOM of 0.04 pJK2 },

publisher = {Institute of Electrical and Electronics Engineers (IEEE)},

isbn = {0018-9200},

isbn = {1558-173X},

keywords = { Electrical and Electronic Engineering },

year = {2017},

url = { http://slubdd.de/katalog?TN_libero_mab2 }