%0 Generic
%T Performance-driven optical proximity correction for mask cost reduction
%A Kahng, Andrew B.
%I SPIE-Intl Soc Optical Eng
%@ 1932-5150
%K Electrical and Electronic Engineering
%K Mechanical Engineering
%K Condensed Matter Physics
%K Atomic and Molecular Physics, and Optics
%K Electronic, Optical and Magnetic Materials
%D 2007
%C SPIE-Intl Soc Optical Eng
%U http://slubdd.de/katalog?TN_libero_mab2
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