%0 Generic
%T Measuring large amplitude surface figure error using coordinate metrology
%A Khreishi, Manal
%A Ohl, Raymond G.
%A Mcclelland, Ryan
%A Shiri, Ron
%A Hewagama, Tilak
%A Aslam, Shahid
%A Ulmer, Melville P.
%A Canavan, Edgar
%A Liang, Rongguang
%I SPIE-Intl Soc Optical Eng
%@ 0091-3286
%K General Engineering
%K Atomic and Molecular Physics, and Optics
%D 2021
%C SPIE-Intl Soc Optical Eng
%U http://slubdd.de/katalog?TN_libero_mab2
Download citation