author = { Pham, Nga P. AND Scholtes, Tom L. AND Klerk, Ruud AND Wieder, Bernhard AND Sarro, Pasqualina M. AND Burghartz, Joachim N. },

title = { Direct spray coating of photoresist for MEMS applications },

publisher = {SPIE},

isbn = {0277-786X},

year = {2001},

url = { http://slubdd.de/katalog?TN_libero_mab2 }