author = { Rau, Jenspeter AND Wendt, Hermann AND Mathuni, Josef AND Stepper, Christoph AND Ehrmann, Albrecht AND Kamm, Frank-Michael },

title = { EUV mask development: material and process },

publisher = {SPIE},

isbn = {0277-786X},

year = {2002},

url = { http://slubdd.de/katalog?TN_libero_mab2 }