@misc
{slub-ai-49-aHR0cDovL2R4LmRvaS5vcmcvMTAuMTExNy8xMi40ODUwNDI,
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author = {
van Loyen, Ludwig
AND
Boettger, Thomas
AND
Braun, Stefan
AND
Mai, Hermann
AND
Leson, Andreas
AND
Scholze, Frank
AND
Tuemmler, Johannes
AND
Ulm, Gerhard
AND
Legall, Herbert
AND
Nickles, Peter V.
AND
Sandner, Wolfgang
AND
Stiel, Holger
AND
Rempel, Christian E.
AND
Schulze, Mirko
AND
Brutscher, Joerg
AND
Macco, Fritz
AND
Muellender, Stefan
},
title = {
New laboratory EUV reflectometer for large optics using a laser plasma source
},
publisher = {SPIE},
isbn = {0277-786X},
year = {2003},
}