author = { Otto, Juergen AND Paquet, Volker AND Kersten, Ralf T. AND Etzkorn, Heinz-Werner AND Brusasco, Raymond M. AND Britten, Jerald A. AND Campbell, Jack H. AND Thorsness, J. B. },

title = { Radio frequency and microwave plasma for optical thin-film deposition },

publisher = {SPIE},

isbn = {0277-786X},

year = {1990},

url = { http://slubdd.de/katalog?TN_libero_mab2 }