TY - BOOK
AU - Gupta, Devendra
AU - Ho, Paul S.
TI - Diffusion phenomena in thin films and microelectronic materials
PB - Noyes Publ.
SN - 0815511671
KW - Diffusion
KW - Thin films
KW - Microstructure
KW - Semiconductors Diffusion
KW - Dünne Schicht
PY - 1988
N2 - Literaturangaben
BT - Materials science and process technology series
CY - Park Ridge, N.J.
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
Download citation