TY -
BOOK
AU - Kockmann, Norbert
TI -
Micro process engineering
fundamentals, devices, fabrication, and applications
PB - Wiley-VCH
SN - 9783527335008
KW - Mikroverfahrenstechnik
PY - 2013
BT - Advanced micro & nanosystems ; 5
CY - Weinheim
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -