TY - BOOK
AU - Symposium on Reliability of Metals in Electronics 1995 Reno, Nev
AU - Electrochemical Society Sensor Division
AU - Electrochemical Society Electronics Division
AU - Electrochemical Society Dielectric Science and Technology Division
AU - Hesketh, P. J.
AU - Zemel, Jay N.
AU - Hughes, Henry G.
TI - Proceedings of the Symposium on Microstructures and microfabricated systems [... held at the 185th Meeting of the Electrochemical Society in San Francisco, California, May 23 - 25, 1994]
PB - Electrochemical Society
SN - 1566770467
KW - Microelectronics
KW - Congresses
KW - Microstructure
KW - Micromechanics
KW - Konferenzschrift
KW - Mikrostruktur
KW - Mikrosystemtechnik
PY - 1994
N2 - Includes bibliographical references and indexes
BT - Proceedings / Electrochemical Society ; 94,14 ; Sensors, Electronics and Dielectric Science and Technology Divisions
CY - Pennington, NJ
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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