TY - GEN
AU - European Workshop: Materials for Advanced Metallization (1997 :Villard-de-Lans, France)
AU - France Ministère de l'éducation nationale, de l'enseignement supérieur, de la recherche et de l'insertion professionnelle
AU - International Union for Vacuum Science, Technique and Applications
AU - IEEE Electron Devices Society
TI - MAM '97, abstracts booklet European Workshop: Materials for Advanced Metallization, Villard-de-Lans, France, March 16-19, 1997
PB - Société française du vide
SN - 0780339762
SN - 9780780339767
KW - Integrated circuits Very large scale integration Design and construction Congresses
KW - Semiconductor-metal boundaries Congresses
KW - Metallizing Congresses
KW - Konferenzschrift
PY - 2010
N2 - "Supplément à la revue no 283"--Cover
N2 - "With the sponsorship of IUVSTA (International Union for Vacuum Science, Technique and Applications), Ministère de l'éducation nationale, de l'enseignement supérieur et de la recherche, IEEE-EDS"--1st prelim. page
N2 - Includes bibliographical references and index
N2 - Use copy Restrictions unspecified star MiAaHDL
CY - Paris, France
UR - https://katalog.slub-dresden.de/en/?cHash=0bb8bd27a7fbde41cd02875a74ca0f3d&tx_find_find%5Baction%5D=citation&tx_find_find%5Bcontroller%5D=Search&tx_find_find%5Bid%5D=0-894514601&tx_find_find%5Btype%5D=ris
ER -
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