TY - GEN
AU - Yamada, Itsunari
AU - Ikeda, Yusuke
AU - Higuchi, Tetsuya
TI - Fabrication of tunable diffraction grating by imprint lithography with photoresist mold
PB - AIP Publishing
SN - 0034-6748
SN - 1089-7623
KW - Instrumentation
PY - 2018
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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