TY - GEN
AU - Zhang, Shi-Li
AU - Östling, Mikael
TI - Metal Silicides in CMOS Technology: Past, Present, and Future Trends
PB - Informa UK Limited
SN - 1040-8436
SN - 1547-6561
KW - Electrical and Electronic Engineering
KW - Physical and Theoretical Chemistry
KW - Condensed Matter Physics
KW - General Chemical Engineering
KW - Electronic, Optical and Magnetic Materials
PY - 2003
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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