TY - GEN
AU - Steingoetter, Ingo
AU - Fouckhardt, Henning
TI - Deep fused silica wet etching using an Au-free and stress-reduced sputter-deposited Cr hard mask
PB - IOP Publishing
SN - 0960-1317
SN - 1361-6439
KW - Electrical and Electronic Engineering
KW - Mechanical Engineering
KW - Mechanics of Materials
KW - Electronic, Optical and Magnetic Materials
PY - 2005
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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