TY - GEN
AU - Engesser, Manuel
AU - Franke, Axel R.
AU - Maute, Matthias
AU - Meisel, Daniel C.
AU - Korvink, Jan G.
TI - A robust and flexible optimization technique for efficient shrinking of MEMS accelerometers
PB - Springer Science and Business Media LLC
SN - 0946-7076
SN - 1432-1858
KW - Electrical and Electronic Engineering
KW - Hardware and Architecture
KW - Condensed Matter Physics
KW - Electronic, Optical and Magnetic Materials
PY - 2010
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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