TY - GEN
AU - Harendt, Christine
AU - Hofflinger, Bernd
AU - Graf, Heinz-Gerd
AU - Penteker, Elisabeth
TI - Silicon direct bonding for sensor applications: Characterization of the bond quality
PB - Elsevier BV
SN - 0924-4247
KW - Electrical and Electronic Engineering
KW - Metals and Alloys
KW - Surfaces, Coatings and Films
KW - Condensed Matter Physics
KW - Instrumentation
KW - Electronic, Optical and Magnetic Materials
PY - 1990
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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