TY - GEN
AU - Pérez-Junquera, A.
AU - Martín, J.I.
AU - Alameda, J.M.
TI - One-step fabrication of large area arrays of dots by electron beam lithography
PB - Elsevier BV
SN - 0167-9317
KW - Electrical and Electronic Engineering
KW - Surfaces, Coatings and Films
KW - Condensed Matter Physics
KW - Atomic and Molecular Physics, and Optics
KW - Electronic, Optical and Magnetic Materials
PY - 2007
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
Download citation