TY - GEN
AU - Yao, Yong
AU - van Mourik, Martin W.
AU - Santhana Raman, P.
AU - van Kan, Jeroen A.
TI - Improved beam spot measurements in the 2nd generation proton beam writing system
PB - Elsevier BV
SN - 0168-583X
PY - 2013
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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