TY - GEN
AU - Asari, Shin
AU - Fujinaga, Tetsushi
AU - Takagi, Makiko
AU - Hashimoto, Masanori
AU - Saito, Kazuya
AU - Harada, Masamichi
AU - Ishikawa, Michio
TI - ULVAC research and development of Cat-CVD applications
PB - Elsevier BV
SN - 0040-6090
KW - Materials Chemistry
KW - Metals and Alloys
KW - Surfaces, Coatings and Films
KW - Surfaces and Interfaces
KW - Electronic, Optical and Magnetic Materials
PY - 2008
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
Download citation