TY - GEN
AU - Desbiolles, B. X. E.
AU - Bertsch, A.
AU - Renaud, P.
TI - Ion beam etching redeposition for 3D multimaterial nanostructure manufacturing
PB - Springer Science and Business Media LLC
SN - 2055-7434
PY - 2019
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
Download citation