TY - GEN
AU - Inoue, Soichi
AU - Tanaka, Yoko
AU - Sato, Takashi
AU - Shuichi Tamamushi, Shuichi Tamamushi
AU - Makoto Nakase, Makoto Nakase
TI - Simulation Study on Phase-Shifting Masks for Isolated Patterns
PB - IOP Publishing
SN - 0021-4922
SN - 1347-4065
KW - General Physics and Astronomy
KW - General Engineering
PY - 1991
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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