TY - GEN
AU - Bischoff, Lothar
AU - Klingner, Nico
AU - Mazarov, Paul
AU - Pilz, Wolfgang
AU - Meyer, Fabian
TI - Boron liquid metal alloy ion sources for special focused ion beam applications
PB - American Vacuum Society
SN - 2166-2746
SN - 2166-2754
KW - Materials Chemistry
KW - Electrical and Electronic Engineering
KW - Surfaces, Coatings and Films
KW - Process Chemistry and Technology
KW - Instrumentation
KW - Electronic, Optical and Magnetic Materials
PY - 2020
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -
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