TY -
GEN
AU - Kazanskiy, Nikolay L.
AU - Kolpakov, Vsevolod A.
TI -
Simulation of technological process of microstructures etching in high-voltage gas discharge plasma
PB - SPIE
SN - 0277-786X
PY - 2004
UR - http://slubdd.de/katalog?TN_libero_mab2
ER -